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The article

Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging

Yuka Esashi, Nicholas W. Jenkins, Yunzhe Shao, Justin M. Shaw, Seungbeom Park, Margaret M. Murnane and 2 more

Rank
12 of 884
Percentile
top 1.4%
Where
Review of Scientific Instruments, 2023
Citations
26

From the 2023 list, OpenAlex counts as of 2026-10-29.

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