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The article
A Review: Inductively Coupled Plasma Reactive Ion Etching of Silicon Carbide
Katarzyna Racka, Bartłomiej Stonio, Jarosław Żelazko, Maciej Filipiak, Mariusz Sochacki
- Rank
- 41 of 7,962
- Percentile
- top 0.6%
- Where
- Materials, 2021
- Citations
- 180
From the 2021 list, OpenAlex counts as of 2026-10-29.
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