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The article

Hybrid low‐ k spacer scheme for advanced FinFET technology parasitic capacitance reduction

M. Gu, X. Wang, W. Li, Michael C. Aquilino, Jianwei Peng, H. Wang and 7 more

Rank
34 of 508
Percentile
top 6.7%
Where
Electronics Letters, 2020
Citations
21

From the 2020 list, OpenAlex counts as of 2026-10-29.

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