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The article

Target state control and preparation of tantalum oxide thin films by water vapor sputtering

Yusuke Ito, Yoshio Abe, Midori Kawamura, Kyung Ho Kim, Takayuki Kiba

Rank
85 of 5,611
Percentile
top 1.6%
Where
The Japan Society of Applied Physics, 2019
Citations
0

From the 2019 list, OpenAlex counts as of 2026-10-29.

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