Your Top 50 most-cited badge
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The article
Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks
Xin Meng, Youngchul Byun, Harrison Kim, Joy Lee, Antonio Tomas Lucero, Lanxia Cheng and 1 more
- Rank
- 45 of 1,033
- Percentile
- top 4.4%
- Where
- Materials, 2016
- Citations
- 140
From the 2016 list, OpenAlex counts as of 2026-10-29.
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