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The article
Mechanisms of acid generation from ionic photoacid generators for extreme ultraviolet and electron beam lithography
Chengbin Fu, Kun Du, Jie Xue, Hanshen Xin, Jianhua Zhang, Haoyuan Li
- Rank
- 99 of 2,576
- Percentile
- top 3.9%
- Where
- Physical Chemistry Chemical Physics, 2024
- Citations
- 22
From the 2024 list, OpenAlex counts as of 2026-10-29.
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