Your Top 100 most-cited badge
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The article
Effect of HF Pressure on Thermal Al2O3Atomic Layer Etch Rates and Al2O3Fluorination
Austin M. Cano, Amy E. Marquardt, Jaime W. DuMont, Steven M. George
- Rank
- 88 of 3,385
- Percentile
- top 2.6%
- Where
- The Journal of Physical Chemistry C, 2019
- Citations
- 97
From the 2019 list, OpenAlex counts as of 2026-10-29.
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