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The article

Aperture design for a dark-field wafer defect inspection system

Chao Liu, Shuang Xu, Yufei Liu, Zainan Xiao

Rank
31 of 1,566
Percentile
top 2%
Where
Applied Optics, 2021
Citations
36

From the 2021 list, OpenAlex counts as of 2026-10-29.

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