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The article
Influence of ion-beam etching by Ar ions with an energy of 200–1000 eV on the roughness and sputtering yield of a single-crystal silicon surface
M. S. Mikhailenko, A. E. Pestov, N. I. Chkhalo, M. V. Zorina, A. K. Chernyshev, N. N. Salashchenko and 1 more
- Rank
- 19 of 1,414
- Percentile
- top 1.4%
- Where
- Applied Optics, 2022
- Citations
- 33
From the 2022 list, OpenAlex counts as of 2026-10-29.
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