Your Top 50 most-cited badge
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The article
Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions?
Kenji Ishikawa, Kazuhiro Karahashi, Takanori Ichiki, Jane P. Chang, Steven M. George, W. M. M. Kessels and 4 more
- Rank
- 29 of 1,269
- Percentile
- top 2.3%
- Where
- Japanese Journal of Applied Physics, 2017
- Citations
- 56
From the 2017 list, OpenAlex counts as of 2026-10-29.
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