Your Top 50 most-cited badge
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The article
Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach
Tomihito Ohba, Wenbing Yang, Samantha Tan, Keren J. Kanarik, Kazuo Nojiri
- Rank
- 15 of 1,269
- Percentile
- top 1.2%
- Where
- Japanese Journal of Applied Physics, 2017
- Citations
- 77
From the 2017 list, OpenAlex counts as of 2026-10-29.
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