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The article

Inductively-coupled-plasma reactive ion etching of single-crystal β-Ga 2 O 3

Liheng Zhang, Amit Kumar Verma, Huili Grace Xing, Debdeep Jena

Rank
12 of 1,269
Percentile
top 1%
Where
Japanese Journal of Applied Physics, 2017
Citations
81

From the 2017 list, OpenAlex counts as of 2026-10-29.

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