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The article
Progress in nanoscale dry processes for fabrication of high-aspect-ratio features: How can we control critical dimension uniformity at the bottom?
Kenji Ishikawa, Kazuhiro Karahashi, Tatsuo Ishijima, Sung‐Il Cho, Simon D. Elliott, Dennis M. Hausmann and 3 more
- Rank
- 6 of 1,406
- Percentile
- top 0.5%
- Where
- Japanese Journal of Applied Physics, 2018
- Citations
- 114
From the 2018 list, OpenAlex counts as of 2026-10-29.
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