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The article
Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura and 14 more
- Rank
- 44 of 1,558
- Percentile
- top 2.9%
- Where
- Japanese Journal of Applied Physics, 2019
- Citations
- 39
From the 2019 list, OpenAlex counts as of 2026-10-29.
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