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The article

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

Moataz Eissa, Takuya Mitarai, Tomohiro Amemiya, Yasuyuki Miyamoto, Nobuhiko Nishiyama

Rank
45 of 977
Percentile
top 4.7%
Where
Japanese Journal of Applied Physics, 2020
Citations
27

From the 2020 list, OpenAlex counts as of 2026-10-29.

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