Your Top 50 most-cited badge
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The article
Characterization techniques of ion bombardment damage on electronic devices during plasma processing—plasma process-induced damage
Koji Eriguchi
- Rank
- 24 of 876
- Percentile
- top 2.8%
- Where
- Japanese Journal of Applied Physics, 2021
- Citations
- 29
From the 2021 list, OpenAlex counts as of 2026-10-29.
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