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The article
Isotropic atomic layer etchings of various materials by using dry chemical removal
Hiroto Ohtake, Nobuya Miyoshi, Kazunori K. Shinoda, Sumiko Fujisaki, Yoshihide YAMAGUCHI
- Rank
- 42 of 885
- Percentile
- top 4.8%
- Where
- Japanese Journal of Applied Physics, 2022
- Citations
- 18
From the 2022 list, OpenAlex counts as of 2026-10-29.
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