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The article

Effect of the temperature and HCl partial pressure on selective-area gas etching of (001) β-Ga2O3

Yuichi Oshima, Takayoshi Oshima

Rank
37 of 842
Percentile
top 4.4%
Where
Japanese Journal of Applied Physics, 2023
Citations
16

From the 2023 list, OpenAlex counts as of 2026-10-29.

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