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The article

Recent progress and future of electron multi-beam mask writer

Jumpei Yasuda, Haruyuki Nomura, Hiroshi Matsumoto, Noriaki Nakayamada, Hiroshi Yamashita

Rank
21 of 842
Percentile
top 2.5%
Where
Japanese Journal of Applied Physics, 2023
Citations
23

From the 2023 list, OpenAlex counts as of 2026-10-29.

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