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The article

Effects of ion implantation process on defect distribution in SiC SJ-MOSFET

Takuya Fukui, Tatsuya Ishii, Takeshi Tawara, Kensuke Takenaka, Masashi Kato

Rank
17 of 842
Percentile
top 2.1%
Where
Japanese Journal of Applied Physics, 2023
Citations
24

From the 2023 list, OpenAlex counts as of 2026-10-29.

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