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The article
Progress report on high aspect ratio patterning for memory devices
Meihua Shen, Thorsten B. Lill, John Hoang, Hao Chi, Aaron L. Routzahn, Jonathan Church and 6 more
- Rank
- 4 of 842
- Percentile
- top 0.5%
- Where
- Japanese Journal of Applied Physics, 2023
- Citations
- 51
From the 2023 list, OpenAlex counts as of 2026-10-29.
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