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The article
Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology
Kisuke Miyado, Devi Srujana Tenneti, Akira Onishi, Katsuyuki Machida, Tomoyuki Kurioka, Tso‐Fu Mark Chang and 3 more
- Rank
- 47 of 758
- Percentile
- top 6.3%
- Where
- Japanese Journal of Applied Physics, 2024
- Citations
- 9
From the 2024 list, OpenAlex counts as of 2026-10-29.
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