Your Top 50 most-cited badge
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The article
Mask innovations on the eve of high NA EUV lithography
Vicky Philipsen, Andreas Frommhold, Devesh Thakare, Guillaume Libeert, Inhwan Lee, Joern-Holger Franke and 8 more
- Rank
- 19 of 758
- Percentile
- top 2.6%
- Where
- Japanese Journal of Applied Physics, 2024
- Citations
- 12
From the 2024 list, OpenAlex counts as of 2026-10-29.
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