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The article

Understanding chemical and physical mechanisms in atomic layer deposition

Nathaniel E. Richey, Camila de Paula, Stacey F. Bent

Rank
31 of 2,047
Percentile
top 1.6%
Where
The Journal of Chemical Physics, 2020
Citations
284

From the 2020 list, OpenAlex counts as of 2026-10-29.

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