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The article
Patterned Wafer Geometry Grouping for Improved Overlay Control
Honggoo Lee, Sangjun Han, Jaeson Woo, Park Junbeom, Changrock Song, Fatima Anis and 7 more
- Rank
- 9 of 78
- Percentile
- top 11.6%
- Where
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017
- Citations
- 1
From the 2017 list, OpenAlex counts as of 2026-10-29.
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