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The article
EUVのためのロバストなPSCARプロセスの構築【JST・京大機械翻訳】
Carcasi Michael, Seiji Nagahara, Gosuke Shiraishi, Yukie Minekawa, Ide Hiroyuki, Kondo Yoshihiro and 23 more
- Rank
- 44 of 369
- Percentile
- top 12%
- Where
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2018
- Citations
- 0
From the 2018 list, OpenAlex counts as of 2026-10-29.
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