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The article
EUV角度分解散乱(EUV-ARS):ナノメートル構造の特性評価のための新しいツール【JST・京大機械翻訳】
Analía Fernández Herrero, Heiko Mentzel, Victor Soltwisch, Sina Jaroslawzew, Christian Laubis, Frank Scholze
- Rank
- 37 of 369
- Percentile
- top 10.1%
- Where
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2018
- Citations
- 0
From the 2018 list, OpenAlex counts as of 2026-10-29.
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