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The article

FPDパネルフォトマスク用の新しい超高平坦基板【JST・京大機械翻訳】

Youkou Ishitsuka, Harada Daijitsu, Watabe Atsushi, Takeuchi Masaki

Rank
32 of 369
Percentile
top 8.7%
Where
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2018
Citations
0

From the 2018 list, OpenAlex counts as of 2026-10-29.

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